High-sensitivity low-power MEMS accelerometer for detecting extremely weak ground and building vibrations

Hitachi Ltd. today announced the development of a high-sensitivity low-power MEMS accelerometer that can detect extremely weak ground and building vibrations by combining sophisticated MEMS technology with circuit technology. The sensor achieves a comparable sensitivity to that of sensors for oil & gas exploration (noise level 30ng/√Hz) with less than half the power consumption (20mW). Hitachi intends to apply this sensor to various applications including next generation oil & gas exploration,…
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